Ultra-Pure Water (UPW) System for a Semiconductor Manufacturer

Introduction

In the semiconductor industry, ultra-pure water (UPW) is the “lifeblood” of the manufacturing process. Even the smallest trace of organic carbon or a single microscopic particle can lead to catastrophic defects in wafer fabrication.

GlobalUF recently completed the installation and commissioning of a high-precision 3000L/H Ultra-Pure Water System for a leading semiconductor manufacturer in Huizhou, Guangdong. The system was engineered to transform municipal tap water into electronic-grade water meeting the rigorous ASTM D1193 standards.

• Location: Huizhou, Guangdong, China
• Capacity: 3000L/H
• Application: Semiconductor cleaning and wet processing
• Feed Water: Municipal Tap Water (Conductivity ~300 µS/cm)
• Standard: ASTM D1193 (Type I/II Compliance)

The Challenge: Meeting the ASTM D1193 Stringency

The client required a system capable of delivering water with extremely low ionic and organic content, specifically targeting:

1. Resistivity: ≥15.0 MΩ·cm @ 25°C (Stable at 18.2 MΩ·cm preferred).
2. TOC (Total Organic Carbon): ≤50 µg/L.
3. Microbial Control: High sensitivity to mesophilic bacteria and endotoxins.
4. Particle Integrity: Strict limits on metallic and non-metallic particles (≤50µm).

With raw water conductivity at 300 µS/cm and no detailed seasonal water report, the system needed built-in redundancy and high-efficiency pre-treatment to protect the downstream EDI and Polishing Mixed Bed modules.

The Solution: A Multi-Stage Advanced Treatment Process

To ensure total reliability, GlobalUF implemented a comprehensive treatment train combining membrane separation, continuous electrodeionization, and advanced oxidation.

1. Process Flow Diagram

The system follows a sophisticated path from pre-treatment to the ultra-pure water loop: Raw Water Tank → Sand Filter → Activated Carbon Filter → Softener → Precision Filter → 1st Stage RO → Intermediate Tank → EDI System → Polishing Mixed Bed → UV Sterilizer → Ozone Disinfection Loop → UPW Storage Tank → Terminal Filter → Point of Use (POU).

2. Technical Highlights

• Continuous Deionization (EDI): By utilizing high-performance EDI modules, we eliminated the need for chemical regeneration, ensuring a constant stream of high-purity water and reducing environmental footprint.
• Double Polishing: The combination of EDI + Polishing Mixed Bed ensures the resistivity remains consistently near the theoretical limit of 18.2 MΩ·cm.
• Advanced Sterilization: A dual-action approach using UV Irradiation and Ozone (O3) Injection. Ozone is continuously recirculated within the pure water tank to maintain a sterile environment and degrade trace organics (TOC).
• High-Purity Distribution: All piping in the UPW loop is constructed from Electronic-grade PVDF. PVDF is chosen for its superior chemical inertness, ensuring zero leaching of ions or TOC into the high-purity stream.

3. Smart Automation & Control

The system is managed via a centralized PLC + Touch Screen (HMI) interface, providing:

• Real-time monitoring of Resistivity, TOC, Flow, and Pressure.
• Automated backwashing and chemical-free maintenance cycles.
• Remote monitoring capabilities for 24/7 operational security.

Project Gallery

Globaluf Industrial Water Treatment System: Manufacturing & Assembly in Progress

Globaluf 3m³/h Ultrapure Water System: Fully Installed & Commissioned On-Site

System Detail Breakdown

Globaluf Ultrapure Water System: RO, EDI & Mixed Bed Components for High Purity

Results & Performance

Upon final commissioning, the system exceeded the client’s expectations and ASTM D1193 requirements:

• Resistivity: 17.5 – 18.2 MΩ·cm (Stable)
• TOC: < 20 µg/L (Well below the 50 µg/L limit)
• Sodium (Na) & Chloride (Cl): < 2 µg/L
• Microbial Count: Compliant with Grade C specifications.
• Operation: 100% automated with zero manual intervention required for daily production.

Conclusion

This 3000L/H UPW project underscores GlobalUF’s ability to deliver high-spec water solutions for the semiconductor industry. By integrating Electronic-grade PVDF piping and a UV/Ozone dual-sterilization loop, we provided the client with a system that is not only high-performing but also resilient against biological fouling and ionic contamination.

Do you need a customized UPW solution for your semiconductor or electronics facility? GlobalUF specializes in designing systems that meet the world’s strictest water quality standards.

Contact our Engineering Team today for a Technical Consultation！